Sensor

  • Measurement range: 10 mm
  • Reference distance: 30 mm
  • Maximum vertical resolution (static): 100 nm
  • Spot size: 30 µm at focus
  • Scan speed: 10 mm/s
  • Multiple readings averaged: Yes
  • Correct positioning: Red light / Green light
  • Light source: 650 nm class 2 semiconductor laser max. 0.95 mW

Positioning system specifications

Stepper Motors

  • Scan Range (x,y,z): 110 mm x 110 mm x 110 mm
  • Minimal step size on all axes: 20 nm
  • Closed loop positioning linear zero hysteresis encoder with direct real-time readout of displacement in x, y and z
  • Linear position encoder resolution: 20 nm.
  • Max. scan speed: 10 mm/s
  • Measurement resolution: 32-bit decoder @ up to 40 MHz

Piezoelectric element (for z axis only)

  • Vibration range 20 nm – 2 µm peak to peak with 1 nm increments
  • Min. vibration resolution: 0.12 nm calculated (16-bit DAC on 4 µm)
  • Piezo crystal extension: 100 µm
  • Positioning resolution: 0.09 nm calculated (20-bit DAC on 100 µm)