Super User Specifications Sensor Measurement range: 10 mm Reference distance: 30 mm Maximum vertical resolution (static): 100 nm Spot size: 30 µm at focus Scan speed: 10 mm/s Multiple readings averaged: Yes Correct positioning: Red light / Green light Light source: 650 nm class 2 semiconductor laser max. 0.95 mW Positioning system specifications Stepper Motors Scan Range (x,y,z): 110 mm x 110 mm x 110 mm Minimal step size on all axes: 20 nm Closed loop positioning linear zero hysteresis encoder with direct real-time readout of displacement in x, y and z Linear position encoder resolution: 20 nm. Max. scan speed: 10 mm/s Measurement resolution: 32-bit decoder @ up to 40 MHz Piezoelectric element (for z axis only) Vibration range 20 nm – 2 µm peak to peak with 1 nm increments Min. vibration resolution: 0.12 nm calculated (16-bit DAC on 4 µm) Piezo crystal extension: 100 µm Positioning resolution: 0.09 nm calculated (20-bit DAC on 100 µm)